Design of High Quantum Efficiency and High Resolution, Si/SiGe Avalanche Photodiode Focal Plane Arrays Using Novel, Back- Illuminated, Silicon-on-Sapphire Substrates

The design and development of large scale, high quantum efficiency and high resolution silicon and silicon-germanium (Si/SiGe) avalanche photodiode (APD) focal plane arrays (FPAs) is an active topic of research due to the wide range of scientific, medical and industrial applications for such high sensitivity imagers. Avalanche photodiodes can attain single photon sensitive operation due the large internal device gain that compensates and can fully eliminate the electronic readout noise normally limiting the sensitivity of solidstate detector devices, hence their importance in electronic imaging. Large, wafer scale arrays of ultra sensitive, high resolution silicon and silicon-germanium avalanche photodiodes have not been developed yet, primarily due to the increased fabrication complexity of such detector devices and arrays compared to the more common, nonavalanching detectors such as CCDs and CMOS-APS devices. One major fabrication challenge for avalanche type detectors is the requirement of providing effective optical isolation between adjacent detectors in an array since the avalanche gain process produces photons that could create false detection events in neighboring pixels and thereby increase the noise. Providing effective optical crosstalk isolation becomes more difficult for higher resolution arrays. While it is common for CCD arrays to have a pixel pitch between 12-30 μm and for CMOS-APS devices to have pixel pitch below 10 μm, it becomes more challenging to architect arrays of avalanche photodiodes for example, having such a small pitch due to optical crosstalk. The second major fabrication challenge for linear mode avalanche type detectors, especially critical in arrays is the detector gain uniformity. Detector gain uniformity is a critical performance parameter since an increase in gain excess noise will make the detector arrays unsuitable for precision metrology applications. As solid-state avalanche detectors are made smaller, it becomes more difficult to control the gain excess noise due to smaller area multiplication regions where the effects from slight variations in doping profiles and electric fields produce greater gain variability compared to larger area detectors.